起され，Dよりも小さなdが観測されたと考えられる．高密度電子励起層の厚さを考慮したDの計算モデルの構築は今後の検討課題である． 本研究の予備実験は東京農工大学の重野宏侑氏が行った．東京農工大学大学院の前橋兼三教授に炭素材料のラマン分光に関する貴重な助言をいただいた．東京農工大学大学院の畠山温教授，東京農工大学の星田祐大氏に■■■薄膜の組成分析ならびに貴重な助言をいただいた．本研究の一部は，公益財団法人天田財団からの ■■■年一般研究助成， ■■■年京都大学エネルギー理工学研究所ゼロエミッション共同研究拠点共同利用（■■ ■■■■■の援助により行われた．皆様に深く感謝いたします． 謝■辞■参考文献 1) N. Yasumaru, K. Miyazaki, and J. Kiuchi: Glassy carbon layer films with femtosecond laser pulses, Appl. Phys. A: Mater. Sci. Process., 79, (2004), 425–427. formed in diamond-like carbon 2) K. Miyazaki, N. Maekawa, W. Kobayashi, M. Kaku, N. in Yasumaru, femtosecond-laser-induced of diamond-like carbon film, Appl. Phys. A: Mater. Sci. Process., 80, (2005), 17–21. and 3) G. Miyaji and K. Miyazaki: Ultrafast dynamics of periodic nanostructure formation on diamond-like carbon films irradiated with femtosecond laser pulses, Appl. Phys. Lett., 89, (2006), 191902. 4) G. Miyaji and K. Miyazaki: Nanoscale ablation on patterned diamond-like carbon film with femtosecond laser pulses, Appl. Phys. Lett., 91, (2007), 123102. 5) G. Miyaji and K. Miyazaki: Origin of periodicity in film surfaces ablated with laser pulses, Opt. Express, 16, (2008), nanostructuring on femtosecond 16265–4653. 6) G. Miyaji, K. Miyazaki, K. Zhang, T. Yoshifuji, and J. Fujita: Mechanism of femtosecond-laser-induced periodic nanostructure formation on crystalline silicon surface immersed in water, Opt. Express, 20, (2012), 14848–14856. 7) K. Miyazaki and G. Miyaji: Nanograting formation through surface plasmon fields induced by femtosecond laser pulses, J. Appl. Phys., 114, (2013), 153108. 8) K. Miyazaki, G. Miyaji, and T. Inoue: Nanograting formation on metals in air with interfering femtosecond laser pulses, Appl. Phys. Lett., 107, (2015), 071103. 9) G. Miyaji and K. Miyazaki: Fabrication of 50-nm period gratings on GaN in air through plasmonic near-field ablation induced by ultraviolet femtosecond laser pulses, Opt. Express, 24, (2016), 4648–4653. J. Reflectivity changes Kiuchi: structural thin 10) 宮地悟代, 宮崎健創: 超短パルスレーザを用いた微細加工方法、導出装置、加工装置および加工物, 特開2018-051626. 11) G. Miyaji and K. Miyazaki: Shaping of nanostructured surface in femtosecond laser ablation of thin films, Appl. Phys. A: Mater. Sci. Process., 98, (2010), 927–930. 12) J. Bonse and J. Krüger: Femtosecond 13) K. Miyazaki and G. Miyaji: Mechanism and control of periodic surface nanostructure formation with femtosecond laser pulses, Appl. Phys. A: Mater. Sci. Process., 114, (2014), 177–185 とそこに書かれている参考文献. 14) N. Yasumaru, K. Miyazaki, 15) M. Yoshikawa, G. Katagiri, H. Ishida, and A. Ishitani: Raman spectra of diamondlike amorphous carbon films, J. Appl. Phys., 64, (1988), 6464–6468. 16) S. Zhang, X. T. Zeng, H. Xie, and P. Hing: A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films, Surf. Coat. Tech., 123, (2000), 256–260. 17) J. Robertson: Diamond-like amorphous carbon, Mat. Sci. Eng., R37, (2002), 129–281. 18) F. C. Tai, S. C. Lee, C. H. Wei, and S.L. Tyan: Correlation between ID/IG Ratio from Visible Raman Spectra and sp2/sp3 Ratio from XPS Spectra of Annealed Hydrogenated DLC Film, Mat. Trans., 47, (2006), 1847–1852. 19) F. Tuinstra and J. L. Koenig: Raman Spectrum of Graphite. J. Chem. Phys., 53, (1970), 1126–1130. 20) R. J. Nemanich and S. A. Solin: First- and second-order Raman scattering from finite-size crystals of graphite, Phy. Rev. B., 20, (1979), 392–400. 21) M. Yoshikawa, N. Nagai, M. Matsuki, H. Fukuda, G. Katagiri, H. Ishida, A. Ishitani, and I. Nagai: Raman scattering from sp2 carbon clusters, Phys. Rev. B., 46, (1992), 7169–7174. 22) A. C. Ferrari, and J. Robertson: Interpretation of Raman spectra of disordered and amorphous carbon, Phys. Rev. B, 61, (2000), 14095–1130. 23)M. Wojdyr: Fityk: a general-purpose peak fitting program. J. Appl. Crystal., 43, (2010), 1126–1128. 24) G. Miyaji and K. Miyazaki: Role of multiple shots of femtosecond laser pulses in periodic surface nanoablation, Appl. Phys. Lett., 103, (2013), 071910. 25) K. Sokolowski-Tinten and D. Linde: Generation of dense electron-hole plasmas in silicon, Phys. Rev. B., 61, (2000), 2643–2650. laser-induced periodic surface structures, J. Appl. Phys., 24, (2012), 042006とそこに書かれている参考文献. J. Kiuchi: Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC, Appl. Phys. A: Mater. Sci. Process., 76, (2003), 983–985. and - 77 -
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